Introduction to SECS/GEM Communication Interface Protocol for Semiconductor Equipment - https://www.einnosys.com/i...

SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol.

SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products, and change variables. With SECS/GEM, all this can be performed in a standard way.